Simulation of columnar growth in thin film deposition

This thesis, developed in collaboration with the Istituto Ortopedico Rizzoli (IOR), studies the growth of thin films. Thin film growth is a crucial topic in materials science, affecting fields such as microelectronics, optics, and biomedical engineering. Understanding the mechanisms that govern deposition and structuring is essential to optimize their properties for specific technological needs. Research is focused on modeling and simulating the growth of thin films deposited using the oblique angle deposition technique. This method leads to the formation of inclined columnar structures due to shadowing and self-shadowing effects. Initially, the deposited particles form isolated islands, which later develop into columnar structures as shadowing restricts deposition in certain regions. Despite the existence of several theoretical models, a comprehensive simulator that accurately reproduces the formation of these columns in the early stages is still lacking. To fill this gap, this thesis introduces a MATLAB-based Monte Carlo simulator that models columnar growth by considering the key effects of deposition, particularly shadowing and self-shadowing. The simulator operates independently of material-specific parameters, improving its adaptability in different contexts. Collaboration with the IOR allows this model to be validated by comparing simulated results with experimental data obtained through pulsed electron ablation deposition. Ultimately, this research provides a basis for future studies of columnar thin film growth, offering a versatile and accessible simulation tool for further exploration.